UHV system

UHV system

Our UHV system concept bases on a central transfer chamber surrounded by multiple modules. This allows the transfer of a sample from one chamber into another without venting it. This is done by the advanced transfer manipulator, which is located in the centre of the transfer chamber (=cluster). Transfer chamber and load lock chamber building one unit and allow the introduction and replacement of substrates and targets into and from the UHV conditions (10-9 mbar range).

Our system is composed of:

  • two transfer chambers (=clusters)
  • a mask chamber
  • a transfer tunnel
  • two load lock modules
  • three PLD modules
  • an XPS