Exterior (a), schematic (b) and interior (c) of the PLD system

Pulsed Laser Deposition (PLD) is a physical vapour deposition technique used to grow thin films with the major advantage of stoichiometric material transfer from a target to the substrate.

Our PLD system consists of:

  • two vacuum chambers
  • a KrF excimer laser
  • targets and substrate holders
  • two infrared laser heating systems
  • two high pressure RHEEDs

Our PLD systems are automated to control the whole deposition process. PlumeMaster software is optimized for PLD system control.