Pulsed Laser Deposition (PLD) is a physical vapour deposition technique used to grow thin films with the major advantage of stoichiometric material transfer from a target to the substrate.
Our PLD system consists of:
- two vacuum chambers
- a KrF excimer laser
- targets and substrate holders
- two infrared laser heating systems
- two high pressure RHEEDs
Our PLD systems are automated to control the whole deposition process. PlumeMaster software is optimized for PLD system control.